The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2025
Filed:
Sep. 03, 2020
Asml Netherlands B.v., Veldhoven, NL;
Marleen Kooiman, Eindhoven, NL;
Maxim Pisarenco, Son en Breugel, NL;
Abraham Slachter, Waalre, NL;
Mark John Maslow, Eindhoven, NL;
Bernardo Andres Oyarzun Rivera, Rotterdam, NL;
Wim Tjibbo Tel, Helmond, NL;
Ruben Cornelis Maas, Utrecht, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Described herein is a method of training a model configured to predict whether a feature associated with an imaged substrate will be defective after etching of the imaged substrate and determining etch conditions based on the trained model. The method includes obtaining, via a metrology tool, (i) an after development image of the imaged substrate at a given location, the after development image including a plurality of features, and (ii) an after etch image of the imaged substrate at the given location; and training, using the after development image and the after etch image, the model configured to determine defectiveness of a given feature of the plurality of features in the after development image. In an embodiment, the determining of defectiveness is based on comparing the given feature in the after development image with a corresponding etch feature in the after etch image.