The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2025
Filed:
Apr. 03, 2023
Chroma Ate Inc., Taoyuan, TW;
CHROMA ATE INC., Taoyuan, TW;
Abstract
A wafer inspection system includes a carrier device, a probe card, a first metal kit and a surround separating unit. The probe card includes a detection portion and a conductive layer surrounding the detection portion and disposed on its bottom surface. The first metal kit is configured at a bottom portion of the probe card and coupled to the conductive layer and includes a first window for the detection portion to extend out and a first ring piece extending from a periphery of the first window. The surround separating unit includes a conductive wraparound body surrounding and laterally enclosing the detection portion and a wafer to be inspected during probing. The probe card, first metal kit, carrier device, and conductive wraparound body jointly define an space range, shielding the detection portion and wafer from external noise or interference sources, thereby improving inspection accuracy.