The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2025
Filed:
Apr. 28, 2022
Kla Corporation, Milpitas, CA (US);
David W. Price, Austin, TX (US);
Robert J. Rathert, Mechanicsville, VA (US);
Chet V. Lenox, Lexington, TX (US);
Oreste Donzella, San Ramon, CA (US);
Justin Lach, Portage, MI (US);
John Robinson, Austin, TX (US);
KLA Corporation, Milpitas, CA (US);
Abstract
Systems and methods for determining a diagnosis of a screening system are disclosed. Such systems and methods include identifying defect results based on inline characterization tool data, identifying electrical test results based on electrical test data, generating one or more correlation metrics based on the defect results and the electrical test results, and determining at least one diagnosis of the screening system based on the one or more correlation metrics, the diagnosis corresponding to a performance of the screening system.