The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2025
Filed:
Jun. 27, 2022
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventors:
Assignee:
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 9/032 (2006.01); B01J 19/00 (2006.01); C01B 33/107 (2006.01); C11D 7/04 (2006.01); F28G 9/00 (2006.01);
U.S. Cl.
CPC ...
B08B 9/0321 (2013.01); B01J 19/0013 (2013.01); C01B 33/107 (2013.01); C11D 7/04 (2013.01); F28G 9/00 (2013.01); B01J 2219/00087 (2013.01); B01J 2219/00247 (2013.01); B08B 2209/032 (2013.01);
Abstract
A cleaning system comprise: a first pipeconnected to a reactorused for producing polysilicon by using chlorosilane as a raw material; a heat exchangerconnected to the first pipe; a second pipeprovided between the heat exchangerand the first pipe; and a driving unitprovided at the first pipeor the second pipe. A cleaning liquid circulates through the first pipe, the heat exchangerand the second pipeby the driving unit