The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2025
Filed:
Feb. 15, 2022
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Shih-Yao Lin, New Taipei, TW;
Chieh-Ning Feng, Taichung, TW;
Hsiaowen Lee, Hsinchu, TW;
Ming-Ching Chang, Hsinchu, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;
Abstract
A semiconductor device includes a plurality of first channel layers vertically spaced from one another and a plurality of second channel layers vertically spaced form one another. Each of the plurality of first and second channel layers extend along a first lateral direction. The semiconductor device includes an isolation structure disposed between the plurality of first channel layers and the plurality of second channel layers along a second lateral direction perpendicular to the first lateral direction. The semiconductor device includes a plurality of inner spacers discretely disposed along a first sidewall of the isolation structure that faces toward the first lateral direction, or discretely disposed along a second sidewall of the isolation structure that faces away from the first lateral direction wherein an interface between each of the plurality of inner spacers and the first or second sidewall has a vertical profile.