The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2025
Filed:
Dec. 22, 2022
Applicant:
Senic Inc., Chungcheongnam-do, KR;
Inventors:
Jong Hwi Park, Gyeonggi-do, KR;
Kap Ryeol Ku, Gyeonggi-do, KR;
Jung Gyu Kim, Gyeonggi-do, KR;
Jung Woo Choi, Gyeonggi-do, KR;
Jung Doo Seo, Gyeonggi-do, KR;
Myung Ok Kyun, Gyeonggi-do, KR;
Assignee:
SENIC INC., Chungcheongnam-do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C30B 29/06 (2006.01); C30B 29/36 (2006.01); C30B 33/10 (2006.01); C30B 33/12 (2006.01); C30B 35/00 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C30B 29/06 (2013.01); C30B 29/36 (2013.01); C30B 33/10 (2013.01); C30B 33/12 (2013.01); C30B 35/002 (2013.01); H01L 21/02126 (2013.01);
Abstract
Disclosed are a silicon carbide powder, a method of manufacturing a silicon carbide powder, and a silicon carbide wafer. More particularly, the silicon carbide powder includes carbon and silicon and in the silicon carbide powder, O1s/C1s of a surface measured by X-ray photoelectron spectroscopy is 0.28 or less.