The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2025
Filed:
Jul. 20, 2021
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;
Abstract
A method includes providing a semiconductor structure including a device fin protruding from a substrate, forming a dummy gate stack over the device fin, forming a first spacer over the device fin and the dummy gate stack, forming a second spacer over the first spacer, forming a dielectric feature adjacent to the second spacer, and replacing the dummy gate stack with a metal gate stack. Thereafter, the method removes the second spacer, thereby forming an air gap between the first spacer and the dielectric feature and wrapping around the device fin. The method then forms a sealing layer over the first spacer and the dielectric feature, thereby sealing the air gap.