The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2025
Filed:
Sep. 02, 2021
Tokyo Electron Limited, Tokyo, JP;
Tomonori Horiuchi, Nirasaki, JP;
Dongwei Li, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A transfer apparatus transfers a first substrate and a second substrate while holding the first substrate and the second substrate to overlap each other in a plan view. The transfer apparatus includes: a first holding arm configured to hold the first substrate in a horizontal direction; a second holding arm configured to hold the second substrate in the horizontal direction; a first detection sensor configured to detect presence/absence of the first substrate held by the first holding arm; and a second detection sensor configured to detect presence/absence of the second substrate held by the second holding arm, wherein the first detection sensor includes a sensor configured to detect the presence/absence of the first substrate, and wherein the first holding arm includes a notch formed at least at an inner end portion of a tip of the first holding arm and configured to allow the optical axis to pass therethrough.