The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2025
Filed:
Sep. 22, 2022
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Michael Stolz, Oberkochen, DE;
Timo Laufer, Stuttgart, DE;
Assignee:
CARL ZEISS SMT GMBH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); G01J 5/08 (2022.01);
U.S. Cl.
CPC ...
G03F 7/7085 (2013.01); G01J 5/0859 (2013.01); G03F 7/70891 (2013.01); G03F 7/70975 (2013.01);
Abstract
A device () for detecting a temperature on a surface () of an optical element () for semiconductor lithography. The device includes Also disclosed are an installation () for producing a surface () of an optical element () for semiconductor lithography and a method for producing a surface () of an optical element () of a projection exposure apparatus (), wherein the surface is temperature-controlled and the surface temperature is detected during the temperature control.