The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2025
Filed:
Dec. 07, 2018
Tokyo Electron Limited, Tokyo, JP;
Hitoshi Hashima, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A solution treatment apparatus performs a solution treatment on a substrate using treatment solution. The solution treatment apparatus includes a substrate holder that rotates and holds the substrate; a nozzle that supplies the treatment solution to the substrate on the substrate holder, and raising and lowering pins that raise and lower the substrate above a stage for the substrate. One or more of the pins has a main body having a conductivity; and an inductor part provided outside the main body, The main body has a top portion that comes into contact with the substrate and supports the substrate. A side of the main body opposite to the top portion across the inductor part is directly or indirectly grounded.