The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2025
Filed:
Nov. 01, 2023
Applicant:
Kokusai Electric Corporation, Tokyo, JP;
Inventors:
Assignee:
Kokusai Electric Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 29/14 (2006.01); C23C 16/458 (2006.01); G01M 99/00 (2011.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); H04R 1/08 (2006.01);
U.S. Cl.
CPC ...
G01N 29/14 (2013.01); C23C 16/4583 (2013.01); G01M 99/005 (2013.01); H01L 21/67739 (2013.01); H04R 1/08 (2013.01); H01L 21/67259 (2013.01); H01L 21/67793 (2013.01);
Abstract
There is provided a technique that includes abnormality detecting by picking up a sound generated from a transfer configured to operate in a vacuum and transport a substrate in a vacuum transfer chamber and compare the sound information with a preset threshold value to detect an abnormality of the transfer. The transfer includes a gas-filled container arranged in the vacuum transfer chamber and filled with a gas and a microphone installed inside the gas-filled container.