The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2025
Filed:
Dec. 29, 2020
Applicant:
Orbotech Ltd., Yavne, IL;
Inventors:
Vered Gatt, Rehovot, IL;
Itzhak Saki Hakim, Kfar Saba, IL;
Chay Goldenberg, Tel Aviv, IL;
Mordehay Amirim, Tkuma, IL;
Assignee:
Orbotech Ltd., Yavne, IL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/956 (2006.01);
U.S. Cl.
CPC ...
G01N 21/956 (2013.01); G01N 2021/95638 (2013.01); G01N 2201/127 (2013.01);
Abstract
A method for inspection of multiple features of patterned objects in the manufacture of electrical circuits, the method including performing defect detection on the patterned object, employing an optical defect detection machine (ODDM) and employing the ODDM to measure at least one of spatial coordinates and physical attributes of at least some of the multiple features.