The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2025
Filed:
Nov. 20, 2020
Asml Netherlands B.v., Veldhoven, NL;
Michael Marinus Anna Steur, Eindhoven, NL;
Nicolaas Ten Kate, Almkerk, NL;
Siegfried Alexander Tromp, Knegsel, NL;
Koen Gerhardus Winkels, Schijndel, NL;
Antonius Franciscus Johannes De Groot, Lierop, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
Substrate tables and methods of manufacturing substrate supports for substrate tables. In one arrangement, a plurality of holes are formed through a base member. A burl formation member is joined to the base member. A plurality of burl structures are formed in the burl formation member. Each burl structure includes a distal surface that contacts, in use, a substrate being supported. Each burl structure has an opening to at least one of the holes formed through the base member.