The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 20, 2025

Filed:

Jul. 29, 2022
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Ruilong Xie, Niskayuna, NY (US);

Julien Frougier, Albany, NY (US);

Kangguo Cheng, Schenectady, NY (US);

Chanro Park, Clifton Park, NY (US);

Min Gyu Sung, Latham, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H10D 30/67 (2025.01); H10D 62/10 (2025.01); H10D 84/01 (2025.01); H10D 84/03 (2025.01); H10D 84/85 (2025.01);
U.S. Cl.
CPC ...
H10D 30/6735 (2025.01); H10D 62/121 (2025.01); H10D 84/0128 (2025.01); H10D 84/038 (2025.01); H10D 84/856 (2025.01);
Abstract

A microelectronic structure comprises a first stacked device structure comprising a first upper device and a first lower device, a second stacked device structure comprising a second upper device and a second lower device, and an isolation pillar structure located between the first and second stacked device structures. The isolation pillar structure has an upper section contacting the first and second upper devices and a lower section contacting the first and second lower devices. The upper section of the isolation pillar structure has a first width and the lower section of the isolation pillar structure has a second width different than the first width.


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