The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2025
Filed:
Sep. 23, 2022
Shanghai Huali Integrated Circuit Corporation, Shanghai, CN;
Yongyue Chen, Shanghai, CN;
Shanghai Huali Integrated Circuit Corporation, Shanghai, CN;
Abstract
The present application discloses a method for manufacturing an isolation structure of a hybrid epitaxial area and an active area in an FDSOI, comprising: step 1, providing an FDSOI substrate structure and forming a hard mask layer; step 2, removing the hard mask layer and a semiconductor top layer in the hybrid epitaxial area, so as to form a top trench; step 3, performing lateral etching on the exposed semiconductor top layer from a side surface of the top trench to form a recess cavity; step 4, filling the recess cavity to form an inner spacer; step 5, performing an etching process to form a bottom trench having a bottom surface that exposes a semiconductor body layer; and step 6, performing epitaxial growth to form a semiconductor epitaxial layer in the trench that is in contact with the semiconductor body layer.