The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2025
Filed:
Nov. 07, 2022
Resonac Corporation, Tokyo, JP;
Katsuhisa Yoshida, Tokyo, JP;
Yoshishige Okuno, Tokyo, JP;
Shuji Hatada, Chiba, JP;
Kazunori Ohashi, Chiba, JP;
Resonac Corporation, Tokyo, JP;
Abstract
An inspection condition presentation apparatus includes an intensity calculation part configured to calculate an intensity distribution of scattered light when inspection light is irradiated on a surface of an inspection target on which scatterers of different types are present according to a plurality of incidence condition candidates, and an incidence condition presentation part configured to present, to a user, an incidence condition candidate with which an intensity of the scattered light becomes a maximum, among the plurality of incidence condition candidates.