The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2025
Filed:
Aug. 20, 2021
Asml Netherlands B.v., Veldhoven, NL;
Maarten Jozef Jansen, Hoogeloon, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
Interferometer system including a first detector for receiving a first measurement beam travelling to a reference surface; a second detector for receiving a second measurement beam travelling to the target surface; a reference variable delay path and/or measurement variable delay path and a delay path controller for adapting a delay length. A reference spectral coherence pulse occurs at the first detector, at a reference coherence arrangement and a measurement spectral coherence pulse at the second detector at a measurement coherence arrangement. A control unit receives a reference coherence signal from the first detector, and a measurement coherence signal from the second detector, and determines a zero-position of the target surface based on the reference coherence signal and the measurement coherence signal, and based on the reference coherence arrangement and the measurement coherence arrangement and/or a delay path difference between the reference coherence arrangement and the measurement coherence arrangement.