The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2025
Filed:
Sep. 24, 2020
Applicant:
Versum Materials Us, Llc, Tempe, AZ (US);
Inventors:
Laisheng Sun, Gilbert, AZ (US);
Lili Wang, Chandler, AZ (US);
Aiping Wu, Chandler, AZ (US);
Yi-Chia Lee, Chupei, TW;
Tianniu Chen, Westford, MA (US);
Assignee:
Versum Materials US, LLC, Tempe, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 3/30 (2006.01); C11D 7/26 (2006.01); C11D 7/32 (2006.01); C11D 7/34 (2006.01); G03F 7/42 (2006.01);
U.S. Cl.
CPC ...
G03F 7/425 (2013.01); C11D 7/261 (2013.01); C11D 7/265 (2013.01); C11D 7/3218 (2013.01); C11D 7/3227 (2013.01); C11D 7/34 (2013.01); G03F 7/426 (2013.01); C11D 2111/22 (2024.01);
Abstract
A method and cleaning composition for microelectronic devices or semiconductor substrates including at least one alkanolamine; at least one hydroxylamine or derivatives of hydroxylamine or mixtures thereof; at least one polyfunctional organic acid with at least two carboxylic acid groups and water. The cleaning compositions can further include at least one corrosion inhibitor.