The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 13, 2025

Filed:

Oct. 04, 2021
Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Hironari Ohkubo, Tokyo, JP;

Yuta Yoshida, Tokyo, JP;

Kuo Wei Wu, Tokyo, JP;

Keita Obara, Tokyo, JP;

Shinya Honda, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/03 (2006.01); B23K 26/06 (2014.01); B23K 26/364 (2014.01); B23K 26/402 (2014.01); B23K 103/00 (2006.01); G06T 7/00 (2017.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B23K 26/032 (2013.01); B23K 26/0626 (2013.01); B23K 26/364 (2015.10); B23K 26/402 (2013.01); G06T 7/001 (2013.01); H01L 21/67115 (2013.01); H01L 21/67282 (2013.01); B23K 26/0665 (2013.01); B23K 2103/56 (2018.08); G06T 2207/10152 (2013.01); G06T 2207/30148 (2013.01); G06T 2207/30164 (2013.01);
Abstract

A laser processing apparatus includes a laser beam applying unit for applying a laser beam to a workpiece, an image capturing unit for producing a captured image of the workpiece that includes a captured image of light emitted from the workpiece when the laser beam is applied to the workpiece by the laser beam applying unit, and a control unit. The laser beam applying unit includes a laser oscillator for emitting a laser beam and a condensing lens for converging the laser beam onto the workpiece. The control unit includes a determining section for determining a state of the laser beam applied to the workpiece, on the basis of the shape of the captured image of the light that is included in the captured image of the workpiece.


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