The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 06, 2025

Filed:

Nov. 23, 2021
Applicant:

Micron Technology, Inc., Boise, ID (US);

Inventors:

Jordan D. Greenlee, Boise, ID (US);

Allen McTeer, Eagle, ID (US);

Rita J. Klein, Boise, ID (US);

John D. Hopkins, Meridian, ID (US);

Nancy M. Lomeli, Boise, ID (US);

Xiao Li, Boise, ID (US);

Alyssa N. Scarbrough, Boise, ID (US);

Jiewei Chen, Meridian, ID (US);

Naiming Liu, Meridian, ID (US);

Shuangqiang Luo, Boise, ID (US);

Silvia Borsari, Boise, ID (US);

John Mark Meldrim, Boise, ID (US);

Shen Hu, Boise, ID (US);

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10B 41/27 (2022.12); H10B 41/35 (2022.12); H10B 43/27 (2022.12); H10B 43/35 (2022.12);
U.S. Cl.
CPC ...
H10B 41/27 (2023.01); H10B 41/35 (2023.01); H10B 43/27 (2023.01); H10B 43/35 (2023.01);
Abstract

A memory array comprising strings of memory cells comprises laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Strings of memory cells comprise channel-material strings that extend through the insulative tiers and the conductive tiers in the memory blocks. A through-array-via (TAV) region comprises TAV constructions that extend through the insulative tiers and the conductive tiers. The TAV constructions individually comprise a radially-outer insulative lining and a conductive core radially-inward of the insulative lining. The insulative lining comprises a radially-inner insulative material and a radially-outer insulative material that are of different compositions relative one another. The radially-outer insulative material is in radially-outer recesses that are in the first tiers as compared to the second tiers. The radially-inner insulative material extends elevationally along the insulative tiers and the conductive tiers. Other embodiments, including method, are disclosed.


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