The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 29, 2025

Filed:

Feb. 23, 2022
Applicant:

Nxp Usa, Inc., Austin, TX (US);

Inventors:

Michael B. Vincent, Chandler, AZ (US);

Scott M. Hayes, Chandler, AZ (US);

Assignee:

NXP USA, Inc., Austin, TX (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/498 (2005.12); H01L 23/00 (2005.12); H01L 23/31 (2005.12); H01L 23/538 (2005.12); H01L 25/00 (2005.12); H01L 25/16 (2022.12); H01L 21/48 (2005.12);
U.S. Cl.
CPC ...
H01L 24/19 (2012.12); H01L 23/3185 (2012.12); H01L 23/49816 (2012.12); H01L 23/5386 (2012.12); H01L 24/20 (2012.12); H01L 25/16 (2012.12); H01L 25/50 (2012.12); H01L 21/4853 (2012.12); H01L 24/08 (2012.12); H01L 24/16 (2012.12); H01L 24/32 (2012.12); H01L 24/48 (2012.12); H01L 2224/08225 (2012.12); H01L 2224/16227 (2012.12); H01L 2224/19 (2012.12); H01L 2224/211 (2012.12); H01L 2224/32227 (2012.12); H01L 2224/48227 (2012.12);
Abstract

A method of forming a semiconductor device is provided. The method includes placing a semiconductor die on a carrier substrate and placing a sacrificial blank on the carrier substrate with a routing structure attached to the sacrificial blank. At least a portion of the semiconductor die, sacrificial blank, and routing structure are encapsulated with an encapsulant. The carrier substrate is separated from a first side of the encapsulated semiconductor die, sacrificial blank, and routing structure to expose a surface of the sacrificial blank. The sacrificial blank is etched to form a cavity in the encapsulant and expose a portion of the routing structure exposed through the cavity.


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