The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2025
Filed:
Aug. 08, 2022
Samsung Electronics Co., Ltd., Suwon-si, KR;
Byungchul Yoo, Yongin-si, KR;
Byunghoon Lee, Osan-si, KR;
Myungjun Kim, Osan-si, KR;
Jikang Kim, Osan-si, KR;
Jeonghwan Min, Osan-si, KR;
Kyoungchae Seo, Osan-si, KR;
Changyoung Jeong, Osan-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
FINE SEMITECH CORP., Osan-Si, KR;
Abstract
An adhesive for an EUV mask includes an epoxy resin composition in an amount of 50 wt % to 80 wt % based on a total weight of the adhesive, the epoxy resin composition including an epoxy resin, a hardener, a toughening agent, a filler, and a curing accelerator, and an inorganic filler in an amount of 20 wt % to 50 wt % based on the total weight of the adhesive, the inorganic filler including one or more of aluminum hydroxide or calcium carbonate.