The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2025

Filed:

Feb. 07, 2021
Applicants:

Yamaguchi Prefectural Industrial Technology Institute, Yamaguchi, JP;

Sanwa Industry Co., Ltd., Yamaguchi, JP;

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Takehiko Muranaka, Yamaguchi, JP;

Kouji Niimi, Yamaguchi, JP;

Yuuta Ueno, Yamaguchi, JP;

Hikaru Kikuchi, Miyagi, JP;

Hideto Saito, Miyagi, JP;

Nobuyuki Nagayama, Miyagi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2005.12); B32B 15/01 (2005.12); C25D 11/26 (2005.12); H01L 21/67 (2005.12); H01L 21/683 (2005.12);
U.S. Cl.
CPC ...
C25D 11/26 (2012.12); B32B 15/01 (2012.12); H01J 37/3244 (2012.12); H01J 37/32715 (2012.12); H01L 21/67069 (2012.12); H01L 21/67103 (2012.12); H01L 21/6833 (2012.12); H01J 2237/002 (2012.12); H01J 2237/2007 (2012.12); H01J 2237/334 (2012.12);
Abstract

An anodized titanium material includes a titanium base material and an anodized titanium layer. The anodized titanium layer is provided on a surface of the titanium base material. The anodized titanium layer includes a porous first anodized titanium layer. The anodized titanium layer has a withstand voltage at 25° C. of 500 V or more, a Vickers hardness of 200 or more, a film thickness of 20 μm or more and less than 80 μm, an arithmetic average roughness Ra of a surface of less than 1.6 μm, and a maximum height roughness Rz of the surface is less than 6.3 μm. In both of a section perpendicular to a thickness direction of the first anodized titanium oxide layer and the surface, no pore sections having a shape capable of including a circle having a diameter of 0.5 μm or more are observed.


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