The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 14, 2025

Filed:

Mar. 30, 2021
Applicant:

Adeka Corporation, Tokyo, JP;

Inventors:

Tomoharu Yoshino, Tokyo, JP;

Yoshiki Ooe, Tokyo, JP;

Keisuke Takeda, Tokyo, JP;

Ryota Fukushima, Tokyo, JP;

Chiaki Mitsui, Tokyo, JP;

Atsushi Yamashita, Tokyo, JP;

Assignee:

ADEKA CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C07F 15/06 (2005.12); C01B 33/027 (2005.12); C07F 5/00 (2005.12); C07F 7/02 (2005.12); C07F 7/22 (2005.12); C07F 13/00 (2005.12); C07F 15/04 (2005.12); C23C 16/18 (2005.12); C23C 16/40 (2005.12); C23C 16/455 (2005.12);
U.S. Cl.
CPC ...
C07F 15/065 (2012.12); C01B 33/027 (2012.12); C07F 7/2284 (2012.12); C23C 16/18 (2012.12); C23C 16/407 (2012.12); C23C 16/45553 (2012.12);
Abstract

The present invention provides an amidinate compound represented by the following general formula (1) or a dimer compound thereof, and a method of producing a thin-film including using the compound as a raw material: where Rand Reach independently represent an alkyl group having 1 to 5 carbon atoms, Rrepresents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, M represents a metal atom or a silicon atom, and 'n' represents the valence of the atom represented by M, provided that at least one hydrogen atom of Rto Ris substituted with a fluorine atom.


Find Patent Forward Citations

Loading…