The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2025
Filed:
Oct. 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Chao-Ching Cheng, Hsinchu, TW;
I-Sheng Chen, Taipei, TW;
Tzu-Chiang Chen, Hsinchu, TW;
Shih-Syuan Huang, Taichung, TW;
Hung-Li Chiang, Taipei, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Abstract
Semiconductor structures and method for forming the same are provided. The semiconductor structure includes a substrate and nanostructures formed over the substrate and spaced apart from each other in a first direction. The semiconductor structure further includes a gate structure wrapping around the nanostructures and a semiconductor layer attached to the nanostructures in a second direction different from the first direction. The semiconductor structure further includes inner spacers sandwiched between the semiconductor layer and the gate structure in the second direction and a silicide layer formed over the semiconductor layer. In addition, a first portion of the semiconductor layer is sandwiched between the inner spacers and the silicide layer in the second direction.