Pillar select transistor for 3-dimensional cross point memory

Abstract

A memory device structure includes a vertical transistor having a channel between a source and a drain, a gate electrode adjacent the channel, where the gate electrode is in a first direction orthogonal to a longitudinal axis of the channel. A gate dielectric layer is between the gate electrode and the channel A first terminal of a first interconnect is coupled with the source or the drain, where the first interconnect is colinear with the longitudinal axis. The memory device structure further includes a pair of memory cells, where individual ones of the memory cells includes a selector and a memory element, where a first terminal of the individual ones of the memory cell is coupled to a respective second and a third terminal of the first interconnect. A second terminal of the individual ones of the memory cell is coupled to individual ones of the pair of second interconnects.