The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2025
Filed:
Feb. 25, 2022
Tokyo Electron Limited, Tokyo, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A placing table includes a placing surface, a flow path formed inside to allow a temperature control medium to flow therein, and a discharge opening through which a heat transfer gas is discharged. A gas supply is configured to supply the heat transfer gas to be discharged through the discharge opening. A measurement unit is configured to measure a temperature of the temperature control medium. A controller is configured to control, when the temperature of the temperature control medium is changed by equal to or more than a predetermined temperature at a change timing, a pressure of the heat transfer gas to eliminate a temperature change of a substrate caused by a temperature change of the temperature control medium after a predetermined time taken before the temperature change of the substrate takes place due to the temperature change of the temperature control medium passes by from the change timing.