The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2025
Filed:
Nov. 28, 2022
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
James Jianguo Xu, San Jose, CA (US);
Ken Kinsun Lee, Los Altos Hills, CA (US);
Rusmin Kudinar, Fremont, CA (US);
Ronny Soetarman, Fremont, CA (US);
Hung Phi Nguyen, Santa Clara, CA (US);
Zhen Hou, Fremont, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 21/06 (2006.01); G02B 21/00 (2006.01); G02B 21/36 (2006.01);
U.S. Cl.
CPC ...
G02B 21/06 (2013.01); G02B 21/0092 (2013.01); G02B 21/367 (2013.01);
Abstract
A three-dimensional (3D) microscope includes various insertable components that facilitate multiple imaging and measurement capabilities. These capabilities include Nomarski imaging, polarized light imaging, quantitative differential interference contrast (q-DIC) imaging, motorized polarized light imaging, phase-shifting interferometry (PSI), and vertical-scanning interferometry (VSI).