The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2025
Filed:
Dec. 03, 2020
Applicant:
Anji Microelectronics Technology (Shanghai) Co., Ltd, Shanghai, CN;
Inventors:
Assignee:
ANJI MICROELECTRONICS TECHNOLOGY (SHANGHAI) CO., LTD., Shanghai, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09G 1/02 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01);
Abstract
Disclosed is a chemical mechanical polishing solution containing water, cerium oxide, polyacrylic acid and polyether amine. The chemical mechanical polishing solution in this application uses polyether amine as an additive, which can improve the polishing rate of silicon dioxide by negatively charged cerium oxide.