The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2025
Filed:
May. 18, 2022
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Shinjiro Watanabe, Yamanashi, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2887 (2013.01);
Abstract
An alignment method of a probe card includes a plurality of probe groups provided corresponding to a plurality of chips, comprising: a first mode for calculating a gradient and a center of a probe group based on position information of two or more probes included in the probe group for each of the plurality of chips and calculating a gradient and a center of the probe card based on the calculated gradients and the calculated centers of the plurality of probe groups.