The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 11, 2025

Filed:

Jul. 05, 2022
Applicant:

Hefei University of Technology, Anhui, CN;

Inventors:

Fangfang Liu, Anhui, CN;

Xinyang Liu, Anhui, CN;

Wei Zhou, Anhui, CN;

Xin Ran, Anhui, CN;

Hongli Li, Anhui, CN;

Haojie Xia, Anhui, CN;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01D 5/353 (2006.01); G01B 11/14 (2006.01);
U.S. Cl.
CPC ...
G01D 5/35316 (2013.01); G01B 11/14 (2013.01);
Abstract

A micro-displacement measurement system having a picometer scale resolution and a measurement method. The measurement system comprises a probe module, a demodulation optical path module, a static lock-in amplification module, an upper computer module, and a micro-displacement drive module. The probe module comprises a measurement FBG sensor, a matching FBG sensor, a precision stainless steel needle tube, and an external support; the demodulation optical path module comprises an ASE broadband light source, a first circulator, a second circulator, and an InGaAs photodetector; the upper computer module comprises a data acquisition card and a computer; and the micro-displacement drive module comprises a piezoelectric ceramic nano-positioner, a piezoelectric ceramic driver, a three-dimensional precision micro-motion platform.


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