The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 04, 2025

Filed:

Jun. 27, 2023
Applicant:

Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, TW;

Inventors:

Chenchen Jacob Wang, Hsinchu, TW;

Bo-Feng Young, Taipei, TW;

Yu-Ming Lin, Hsinchu, TW;

Chi On Chui, Hsinchu, TW;

Sai-Hooi Yeong, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10B 53/30 (2023.01); H01L 23/522 (2006.01); H01L 27/06 (2006.01); H01L 27/07 (2006.01); H01L 49/02 (2006.01); H01L 21/56 (2006.01);
U.S. Cl.
CPC ...
H10B 53/30 (2023.02); H01L 23/5223 (2013.01); H01L 27/0629 (2013.01); H01L 27/0733 (2013.01); H01L 28/60 (2013.01); H01L 21/56 (2013.01);
Abstract

A ferroelectric device structure includes an array of ferroelectric capacitors overlying a substrate, first metal interconnect structures electrically connecting each of first electrodes of the array of ferroelectric capacitors to a first metal pad embedded in a dielectric material layer, and second metal interconnect structures electrically connecting each of the second electrodes of the array of ferroelectric capacitors to a second metal pad embedded in the dielectric material layer. The second metal pad may be vertically spaced from the substrate by a same vertical separation distance as the first metal pad is from the substrate. First metal lines laterally extending along a first horizontal direction may electrically connect the first electrodes to the first metal pad, and second metal lines laterally extending along the first horizontal direction may electrically connect each of the second electrodes to the second metal pad.


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