The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2025
Filed:
Oct. 16, 2020
Asml Netherlands B.v., Veldhoven, NL;
Ruud Antonius Catharina Maria Beerens, Roggel, NL;
Koen Gerhardus Winkels, Schijndel, NL;
Dirk Willem Harberts, Eindhoven, NL;
Lucas Henricus Johannes Stevens, Eindhoven, NL;
Dennis Dominic Van Der Voort, Best, NL;
Edwin Johannes Cornelis Bos, Dommelen, NL;
George Alois Leonie Leenknegt, Waalre, NL;
Nicolaas Ten Kate, Almkerk, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A substrate support configured to support a substrate. The substrate support has a plurality of burls protruding from a base surface of the substrate support. The burls have distal ends for supporting a lower surface of the substrate with a gap between the base surface of the substrate support and the lower surface of the substrate. The substrate support has a liquid supply channel configured to supply a conductive liquid to the gap so as to bridge the gap between the base surface of the substrate support and the lower surface of the substrate, to allow charge to pass between the substrate support and the substrate. The substrate support has a controlled electrical potential such that charge distribution at the lower surface of the substrate can be manipulated.