The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 18, 2025

Filed:

Jan. 24, 2024
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

Yeong-Jyh Lin, Caotun Township, TW;

Ching I Li, Tainan, TW;

De-Yang Chiou, Hsinchu, TW;

Sz-Fan Chen, Kaohsiung, TW;

Han-Jui Hu, Tainan, TW;

Ching-Hung Wang, Hsinchu, TW;

Ru-Liang Lee, Hsinchu, TW;

Chung-Yi Yu, Hsin-Chu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); G03F 1/42 (2012.01); G03F 1/70 (2012.01); H01L 21/027 (2006.01); H01L 21/66 (2006.01); H01L 23/544 (2006.01);
U.S. Cl.
CPC ...
H01L 23/544 (2013.01); G03F 1/42 (2013.01); G03F 1/70 (2013.01); H01L 21/0274 (2013.01); H01L 21/6835 (2013.01); H01L 22/20 (2013.01); H01L 2221/68309 (2013.01); H01L 2223/54426 (2013.01);
Abstract

Various embodiments of the present disclosure are directed towards a method for forming an integrated chip. An alignment process is performed on a first semiconductor workpiece and a second semiconductor workpiece by virtue of a plurality of workpiece pins. The first semiconductor workpiece is bonded to the second semiconductor workpiece. A shift value is determined between the first and second semiconductor workpieces by virtue of a first plurality of alignment marks on the first semiconductor workpiece and a second plurality of alignment marks on the second semiconductor workpiece. A layer of an integrated circuit (IC) structure is formed over the second semiconductor workpiece based at least in part on the shift value.


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