The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2025
Filed:
Mar. 29, 2021
Seoul National University R&db Foundation, Seoul, KR;
SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION, Seoul, KR;
Abstract
System for measuring the thickness and properties of a thin film using a spatial light modulator according to the inventive concept includes: a spatial light modulator; a first beam splitter; an objective lens; a second beam splitter; a first camera configured to acquire a surface image of the sample; an optical fiber equipped with a light receiving unit to receive reflected light passing through a certain area of a back focal plane of the objective lens; and a spectrometer configured to measure an intensity of light received from the optical fiber and output the measured intensity as an electrical signal.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile