The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2025
Filed:
Jun. 18, 2020
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Fujihiko Toyomasu, Tokyo, JP;
Junji Kunisawa, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 9/032 (2006.01); B24B 37/20 (2012.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B08B 9/0321 (2013.01); B24B 37/20 (2013.01); H01L 21/67051 (2013.01); B08B 2209/032 (2013.01);
Abstract
To improve liquid draining of a liquid supplying device. A method for draining a liquid of a pipe of a liquid supplying device including a step for drying an inside of the pipe by circulating an inert gas in the pipe without dividing the pipe, wherein the step for drying includes a step for protecting a pressure sensor from static electricity, through a pressure sensor that has a sensor covered portion electrically connected with a housing of the liquid supplying device, the sensor covered portion is exposed to the inside of the pipe or exposed to a flow path communicating with the inside of the pipe.