The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 14, 2025

Filed:

Nov. 05, 2021
Applicant:

Micron Technology, Inc., Boise, ID (US);

Inventors:

Hyuck Soo Yang, Boise, ID (US);

Byung Yoon Kim, Boise, ID (US);

Yong Mo Yang, Boise, ID (US);

Shivani Srivastava, Boise, ID (US);

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/088 (2006.01); H01L 21/28 (2006.01); H01L 21/8234 (2006.01); H01L 29/423 (2006.01); H10B 12/00 (2023.01);
U.S. Cl.
CPC ...
H01L 27/0886 (2013.01); H01L 21/28194 (2013.01); H01L 21/823431 (2013.01); H01L 21/823462 (2013.01); H01L 29/42364 (2013.01); H10B 12/50 (2023.02);
Abstract

Fin field effect transistors (FinFETs) having various different thicknesses of gate oxides and related apparatuses, methods, and computing systems are disclosed. An apparatus includes first FinFETs, second FinFETs, and third FinFETs. The first FinFETs include a first gate oxide material, a second gate oxide material, and a third gate oxide material. The second FinFETs include the second gate oxide material and the third gate oxide material. The third FinFETs include the third gate oxide material. A method includes forming the first gate oxide material on first fins, second fins, and third fins; removing the first gate oxide material from the second fins and the third fins; forming a second gate oxide material over the first fins, the second fins, and the third fins; and removing the second gate oxide material from the third fins.


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