The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2025
Filed:
Aug. 21, 2019
Lam Research Ag, Villach, AT;
Bhaskar Bandarapu, Villach, AT;
David Mui, Fremont, CA (US);
Karl-Heinz Hohenwarter, Dellach/Gail, AT;
Butch Berney, Pleasanton, CA (US);
Nathan Lavdovsky, Beaverton, OR (US);
Christian Putzi, Rosenbach, AT;
Hongbo Si, Santa Clara, CA (US);
Robert Johnson, San Jose, CA (US);
Michael Klemm, Villach, AT;
Bernhard Loidl, Villach, AT;
LAM RESEARCH AG, Villach, AT;
Abstract
A vapor delivery head for wet treatment of a substrate includes a body including an upper surface, a lower surface, an upper plenum and a lower plenum. A first bore is arranged on the upper surface of the body and fluidly connected to the upper plenum to supply heated fluid. A second bore is arranged on the upper surface of the body and connected to the upper plenum to remove heated fluid. A third bore is arranged on the upper surface of the body and connected to the lower plenum to receive a gas mixture. A plurality of through holes through the lower surface of the body are in fluid communication with the lower plenum.