The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2025
Filed:
Jan. 27, 2022
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Tong Wu, Miyagi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 1/24 (2006.01); G01K 11/32 (2021.01); H01J 37/32 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
G01L 1/242 (2013.01); G01K 11/32 (2013.01); H01J 37/32715 (2013.01); H01L 21/6831 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/2445 (2013.01); H01J 2237/24585 (2013.01);
Abstract
A measuring device and an optical fiber strain measuring jig thereof appropriately measure an attraction force distribution on a wafer held by an electrostatic chuck. The measuring jig includes a substrate configured to be held by the electrostatic chuck; and an optical fiber including therein reflection elements capable of reflecting light having a wavelength corresponding to strain of the substrate due to stress, and fixed to one surface of the substrate in a state in which the reflection elements are disposed at plural positions, respectively, on the one surface of the substrate.