The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2025
Filed:
Mar. 01, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Ekaterina A. Mikhaylichenko, San Jose, CA (US);
Fred C. Redeker, Fremont, CA (US);
Brian J. Brown, Palo Alto, CA (US);
Chirantha Rodrigo, Santa Clara, CA (US);
Steven M. Zuniga, Soquel, CA (US);
Jay Gurusamy, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A polishing apparatus includes a support configured to receive and hold a substrate in a plane, a polishing pad affixed to a cylindrical surface of a rotary drum, a first actuator to rotate the drum about a first axis parallel to the plane, a second actuator to bring the polishing pad on the rotary drum into contact with the substrate, and a port for dispensing a polishing liquid to an interface between the polishing pad and the substrate.