The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2024
Filed:
Jul. 26, 2019
Utilize machine learning in selecting high quality averaged sem images from raw images automatically
Asml Netherlands B.v., Veldhoven, NL;
Chen Zhang, San Jose, CA (US);
Qiang Zhang, Campbell, CA (US);
Jen-Shiang Wang, Sunnyvale, CA (US);
Jiao Liang, San Jose, CA (US);
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A method for evaluating images of a printed pattern. The method includes obtaining a first averaged image of the printed pattern, where the first averaged image is generated by averaging raw images of the printed pattern. The method also includes identifying one or more features of the first averaged image. The method further includes evaluating the first averaged image, using an image quality classification model and based at least on the one or more features. The evaluating includes determining, by the image quality classification model, whether the first averaged image satisfies a metric.