The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2024
Filed:
Nov. 06, 2022
Chunghwa Precision Test Tech. Co., Ltd., Taoyuan, TW;
Wei-Jhih Su, Taichung, TW;
Chao-Hui Tseng, New Taipei, TW;
Hao-Yen Cheng, Taoyuan, TW;
Rong-Yang Lai, Taoyuan, TW;
CHUNGHWA PRECISION TEST TECH. CO., LTD., Taoyuan, TW;
Abstract
A cantilever probe card and a probe module thereof are provided. The probe module includes a supporting board, a substrate disposed on the supporting board, a plurality of cantilever probes, and a plurality of fine adjustment members. The substrate has a non-planar shape and has a difference of warpage along a testing direction. One end of each of the cantilever probes is connected to the substrate, and another end of each of the cantilever probes is a free end. The fine adjustment members are spaced apart from each other and are disposed between the supporting board and the substrate. Each of the fine adjustment members is configured to be independently operable along the testing direction for changing a distance between the supporting board and the substrate. The substrate is deformable through at least one of the fine adjustment members so as to reduce the difference of warpage.