The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 17, 2024

Filed:

Jan. 23, 2023
Applicant:

Micron Technology, Inc., Boise, ID (US);

Inventors:

Jordan D. Greenlee, Boise, ID (US);

John D. Hopkins, Meridian, ID (US);

Everett A. McTeer, Eagle, ID (US);

Yiping Wang, Boise, ID (US);

Rajesh Balachandran, Douglas, IE;

Rita J. Klein, Boise, ID (US);

Yongjun J. Hu, Boise, ID (US);

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/538 (2006.01); G11C 5/02 (2006.01); G11C 5/06 (2006.01); H01L 21/768 (2006.01); H01L 23/532 (2006.01); H01L 27/06 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5386 (2013.01); G11C 5/025 (2013.01); G11C 5/06 (2013.01); H01L 21/76802 (2013.01); H01L 21/76877 (2013.01); H01L 23/53204 (2013.01); H01L 23/5384 (2013.01); H01L 23/5385 (2013.01); H01L 27/0688 (2013.01);
Abstract

A microelectronic device comprises a stack structure comprising insulative levels vertically interleaved with conductive levels. The conductive levels individually comprise a first conductive structure, and a second conductive structure laterally neighboring the first conductive structure, the second conductive structure exhibiting a concentration of β-phase tungsten varying with a vertical distance from a vertically neighboring insulative level. The microelectronic device further comprises slot structures vertically extending through the stack structure and dividing the stack structure into block structures, and strings of memory cells vertically extending through the stack structure, the first conductive structures between laterally neighboring strings of memory cells, the second conductive structures between the slot structures and strings of memory cells nearest the slot structures. Related memory devices, electronic systems, and methods are also described.


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