The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2024
Filed:
Mar. 18, 2022
Applicant:
Kokusai Electric Corporation, Tokyo, JP;
Inventors:
Arito Ogawa, Toyama, JP;
Norikazu Mizuno, Toyama, JP;
Atsuhiko Ashitani, Toyama, JP;
Atsuro Seino, Toyama, JP;
Kota Kowa, Toyama, JP;
Assignee:
Kokusai Electric Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/3213 (2006.01); C23F 1/12 (2006.01); H01L 21/285 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
H01L 21/32135 (2013.01); C23F 1/12 (2013.01); H01L 21/28562 (2013.01); H01L 21/28568 (2013.01); H01L 21/30604 (2013.01); H01L 21/30621 (2013.01);
Abstract
A film having film continuity can be formed. There is provided a technique including: preparing a substrate having a metal-containing film formed on a surface thereof; and slimming the metal-containing film by pulse-supplying a halogen-containing gas to the substrate.