The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 10, 2024

Filed:

Nov. 18, 2021
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Sayuri Hada, Machida, JP;

Toyohiro Aoki, Yokohama, JP;

Takashi Hisada, Hachiouji, JP;

Shintaro Yamamichi, Kunitachi, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 24/742 (2013.01); H01L 24/11 (2013.01); H01L 2224/11312 (2013.01); H01L 2224/1184 (2013.01); H01L 2224/742 (2013.01); H01L 2224/749 (2013.01);
Abstract

An apparatus for injecting solder material in via holes located in a top surface of a wafer is provided. The apparatus includes an injection head having a contact surface for contacting the top surface of the wafer, and at least one aperture for injecting the solder material though the injection head into the via holes. The apparatus further includes an evacuating device connected to the injection head for evacuating gas from the via holes. The injection head has a chamfer part on an edge of a contact surface contacting the top surface of the wafer.


Find Patent Forward Citations

Loading…