The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2024
Filed:
Mar. 16, 2021
Applicant:
Kla Corporation, Milpitas, CA (US);
Inventors:
Manikandan Mariyappan, Chennai, IN;
Jin Qian, Shanghai, CN;
Zhuang Liu, Shanghai, CN;
Xiaochun Li, San Jose, CA (US);
Siqing Nie, Shanghai, CN;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2017.01); G06T 7/11 (2017.01);
U.S. Cl.
CPC ...
G06T 7/001 (2013.01); G06T 7/11 (2017.01); G06T 2207/30148 (2013.01);
Abstract
A rendered image is generated from a semiconductor device design file. The rendered image is segmented based on a grey level of the rendered image. Care areas are determined based on the segmenting. Defect inspection is performed in the care areas. This process can be performed on a wafer inspection tool that uses photon optics or electron beam optics.