The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2024
Filed:
May. 14, 2020
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Alexander Prasetya Konijnenberg, Eindhoven, NL;
Willem Marie Julia Marcel Coene, Geldrop, NL;
Nitesh Pandey, Eindhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); G01B 9/02 (2022.01); G01N 21/95 (2006.01); G06V 10/42 (2022.01);
U.S. Cl.
CPC ...
G03F 7/70616 (2013.01); G01B 9/02084 (2013.01); G01N 21/9501 (2013.01); G03F 7/7065 (2013.01); G03F 7/70666 (2013.01); G06V 10/431 (2022.01);
Abstract
Disclosed is a method of determining a complex-valued field relating to a sample measured using an imaging system. The method comprises obtaining image data relating to a series of images of the sample, imaged at an image plane of the imaging system, and for which at least two different modulation functions are imposed in a Fourier plane of the imaging system; and determining the complex-valued field from the imaging data based on the imposed modulation functions.