The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2024
Filed:
Oct. 27, 2022
Infineon Technologies Ag, Neubiberg, DE;
Derek Debie, Bogen, DE;
Klaus Elian, Alteglofsheim, DE;
Ludwig Heitzer, Falkenfels, DE;
David Tumpold, Kirchheim beim München, DE;
Jens Pohl, Bernhardswald, DE;
Cyrus Ghahremani, Regensburg, DE;
Thorsten Meyer, Regensburg, DE;
Christian Geissler, Teugn, DE;
Andreas Allmeier, Pfatter, DE;
INFINEON TECHNOLOGIES AG, Neubiberg, DE;
Abstract
A radiation source device includes at least one membrane layer, a radiation source structure to emit electromagnetic or infrared radiation, a substrate and a spacer structure, wherein the substrate and the at least one membrane form a chamber, wherein a pressure in the chamber is lower than or equal to a pressure outside of the chamber, and wherein the radiation source structure is arranged between the at least one membrane layer and the substrate.