The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2024
Filed:
Jul. 21, 2022
Asm Ip Holding B.v., Almere, NL;
Suvi P. Haukka, Helsinki, FI;
Elina Färm, Helsinki, FI;
Raija H. Matero, Helsinki, FI;
Eva E. Tois, Espoo, FI;
Hidemi Suemori, Helsinki, FI;
Antti Juhani Niskanen, Helsinki, FI;
Sung-Hoon Jung, Tempe, AZ (US);
Petri Räisänen, Gilbert, AZ (US);
ASM IP Holding B.V., Almere, NL;
Abstract
Methods are provided herein for deposition of oxide films. Oxide films may be deposited, including selective deposition of oxide thin films on a first surface of a substrate relative to a second, different surface of the same substrate. For example, an oxide thin film such as an insulating metal oxide thin film may be selectively deposited on a first surface of a substrate relative to a second, different surface of the same substrate. The second, different surface may be an organic passivation layer.