The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 12, 2024

Filed:

Mar. 26, 2019
Applicant:

Aixtron SE, Herzogenrath, DE;

Inventors:

Matthias Johannes Bode, Gemmenich, BE;

Thomas Schmitt, Mönchengladbach, DE;

Micha Cornel Franke, Herzogenrath, DE;

Markus Mohnen, Herzogenrath, DE;

Assignee:

AIXTRON SE, Herzongenrath, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/52 (2006.01); G06K 19/06 (2006.01);
U.S. Cl.
CPC ...
C23C 16/52 (2013.01); G06K 19/06028 (2013.01); G06K 19/06037 (2013.01);
Abstract

Information is communicated to a process control device by performing a process that includes the step of heating a component, the component having structured volumetric regions. When the component is heated, structures present in the volumetric regions radiate in the infrared spectrum, allowing the structures to be distinguished by an infrared sensor. The structures, formed by elevations or depressions, form a machine-readable identifier, which can be used as an originality identification means for the component. Since the identifier can be determined in situ during a heating process, the process control device can recognize whether correction values are to be used for the thermal treatment of a substrate.


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